High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Monolithic diamond Raman laser.

A monolithic diamond Raman laser is reported. It utilizes a 13-mm radius of curvature lens etched onto the diamond surface and dielectric mirror coatings to form a stable resonator. The performance is compared to that of a monolithic diamond Raman laser operating in a plane-plane cavity. On pumping with a compact Q-switched laser at 532 nm (16 μJ pulse energy; 1.5 ns pulse duration; 10 kHz repe...

متن کامل

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fu...

متن کامل

High index contrast polysiloxane waveguides fabricated by dry etching

The authors demonstrate the production of low loss enhanced index contrast waveguides by reactive ion etching of IPGTM polysiloxane thin films. The use of a silica mask and CHF3 /O2 etch gas led to large etch selectivity between the silica and IPGTM of !20 and etch rates of !100 nm /min. This work indicates that compact optical circuits could be successfully fabricated for telecommunication app...

متن کامل

High-quality YBa2Cu3O7-x nanobridges fabricated by FIB etching

Nanostructuring of YBa2Cu3O7-x films is a challenging task on a way to the high-quality YBa2Cu3O7-x nanodevices because of the sensitivity of YBa2Cu3O7-x thin films to the patterning process. In this work we report on a "cold" nanopatterning procedure used for the structuring of the ultra-thin YBa2Cu3O7-x films by focused ion beam etching with a specially developed protection layer, which can b...

متن کامل

A novel monolithic microactuator fabricated by 3D rapid direct manufacture

In this paper we present the world’s first micropump entirely fabricated using a 3D direct manufacture process based on microstereolithography. The device employs a single pneumatically actuated membrane, with flow rectification provided by a nozzle/diffuser arrangement. A maximum flow rate of just over 2,000 μl/min was achieved with a pneumatic pressure of 2 PSIG and a stroke rate of 96 Hz. Th...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Nano Letters

سال: 2015

ISSN: 1530-6984,1530-6992

DOI: 10.1021/acs.nanolett.5b01346